research-focus Research Focus International Scientific Journal Research Focus 2181-3833 Ilm-fan va innovatsiyalar akademiyasi 10.66073/researchfocus.v2i5.186 REL-A-010574 DEFECT FORMATION IN IRON-DOPED SILICON SINGLE CRYSTALS ДЕФЕКТООБРАЗОВАНИЕ В МОНОКРИСТАЛЛАХ КРЕМНИЯ, ЛЕГИРОВАННОГО ЖЕЛЕЗОМ TEMIR BILAN LEGIRLANGAN KREMNIY MONOKRISTALLARIDA DEFEKT HOSIL BO‘LISHI Kh.S. Daliev Branch of the Federal State Budgetary Educational Institution of Higher Education “National Research University MPEI”, Z.M. Khusanov Institute of Semiconductor Physics and Microelectronics at NUUz (Tashkent), Uzbekistan 05 06 2023 2023 2 5 11 15 https://creativecommons.org/licenses/by/4.0 This work is licensed under a Creative Commons Attribution 4.0 International License.

The effect of diffusion alloying with iron on the electrical properties of heat-treated silicon obtained by the Czochralski method has been studied. It is shown that the presence of iron reduces the concentration of nucleation centers for thermal donors of "growth" origin. The latter circumstance caused a decrease in their initial speed; on the other hand, the admixture of iron reduced the probability of decay of thermal donors, leading to their transformation into an electrically passive state, which led to an increase in the concentration of thermal donors during prolonged heating. Heat treatment at temperatures above 600°C caused the iron impurity to lose its electrical activity. Hardening of Si crystals from 1100÷1200 °C for 10 hours returned the iron atoms to the electrically active substitution position.

Исследовано влияние диффузионного легирования железом на электрические свойства термообработанного кремния, полученного методом Чохральского. Показано, что присутствие железа снижает концентрацию зародышей термодоноров «ростового» происхождения. Последнее обстоятельство вызвало снижение их начальной скорости; с другой стороны, примесь железа снижала вероятность распада термодоноров, приводя к их переходу в электрически пассивное состояние, что приводило к увеличению концентрации термодоноров при длительном нагреве. Термическая обработка при температурах выше 600°С приводила к потере электрической активности примеси железа. Закалка кристаллов Si от 1100÷1200 °С в течение 10 часов возвращала атомы железа в электрически активное положение замещения.

Choxralskiy usulida olingan issiqlik bilan ishlangan kremniyning elektr xossalariga temir bilan diffuzion legirlashning ta‘siri o‘rganilgan. Temirning mavjudligi "o‘sish" kelib chiqishiga ega termodonorlar uchun kurtaklanish markazlari konsentratsiyasini kamaytirishi ko‘rsatilgan. Bu holat ularning boshlang‘ich tezligi pasayishiga sabab bo‘ldi; boshqa tomondan, temir aralashmasi termodonorlarning parchalanish ehtimolini kamaytirib, ularning elektr jihatdan passiv holatga o‘tishiga olib keldi, bu esa uzoq muddat qizdirishda termodonorlar konsentratsiyasining ortishiga sabab bo‘ldi. 600°C dan yuqori haroratlarda issiqlik bilan ishlov berish temir aralashmasining elektr faolligini yo‘qotishiga olib keldi. Si (Fe) kristallarini 1100÷1200 °C dan 10 soat davomida chiniqtirish temir atomlarini elektr jihatdan faol o‘rin almashish holatiga qaytardi.

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